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Tohoku University Technology: Electrostatic MEMS Speaker: T17-099

High sound quality and Anti-dust, water etc.

As a acoustic speaker, a dynamic speaker using electromagnetic force (electrodynamic speaker) is used in many cases. In the dynamic speaker, as strong force is required, regarding a small speaker such as an earphone, in particular, the inertial force of the diaphragm is increased relatively, causing a problem of increased deviation between the electrical signal and the vibration.  An electrostatic speaker has been used to solve the foregoing problem. However, in the conventional electrostatic speakers, one or a plurality of holes is required to be formed at each fixed electrode in order to transmit an acoustic wave generated by the vibration of the diaphragm to the outside.This causes a problem that dust, water, moisture, etc. are likely to come in. This invention solves mentioned problems by its new structure.

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